High-bandwidth nanopositioning via active control of system resonance

Abstract Typically, the achievable positioning bandwidth for piezo-actuated nanopositioners is severely limited by first, lightly-damped resonance. To overcome this issue, a variety of open- and closed-loop control techniques that commonly combine damping tracking actions, have been reported in literature. However, almost all these cases, still original open-loop resonant frequency respective axis. Shifting resonance to higher would undoubtedly result wider bandwidth. such shift typically entails major mechanical redesign nanopositioner. The integral (IRC) has earlier demonstrate significant performance enhancement, robustness parameter uncertainty, guaranteed stability design flexibility it affords. further exploit IRC scheme’s capabilities, paper presents method actively shifting nanopositioner’s axis, thereby delivering when controlled with scheme. augmented standard controller improve accuracy. And both parameters are analytically optimized Butterworth Filter mimicking pole-placement—maximally flat passband response. Experiments conducted on axis an at 508 Hz. It shown employing active shifting, increased from 73 576 Consequently, root-mean-square errors 100 Hz triangular trajectory reduced 93%.